Nanofabrication

1 Introduction. - Directions in Nanofabrication. - 2 Nanolithography. - Fundamentals of Electron Beam Exposure and Development. - Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning. - Helium Ion Lithography. - Nanoimprint Technologies. - 3 Deposition at the Nanoscale. - Atomic Layer Deposition for Nanotechnology. - Surface Functionalization in the Nanoscale Domain. - Nanostructures Based on Self-Assembly of Block Copolymers. - Epitaxial Growth of Metals on Semiconductors Via Electrodeposition. - 4 Nanoscale Etching and Patterning. - Chemical Mechanical Polish for Nanotechnology. - Deposition, Milling, and Etching with a Focused Helium Ion Beam. - Laser Nanopatterning. - Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania. -