This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.
Inhaltsverzeichnis
Overview. Semiconductor silicon. Group III-V compounds. Group II-VI semiconductors. Chemical vapour deposition. Plasma-enhanced chemical vapour deposition. Metal-organic vapour phase epitaxy. Liquid-phase epitaxy of III-V compounds. Photoresists. X-ray and E-beam resists. Wet etching. Polyimides. Molecular electronics. Computer modelling. Plasma etching. Polymers in plasmas.
