Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

Inhaltsverzeichnis

Plasma Sputter Deposition Systems: Plasma Generation, Basic Physics and Characterization.- Technology and Application of Filamentless RF - Ion Sources in Ion Beam Sputter Deposition.- Physics of Film Growth from the Vapor Phase.- Techniques for the Growth of Crystalline Films by Molecular Beam Deposition.- Discharge Density Increase for High Rate Magnetron Sputtering.- On the Transport of Sputtered Species in Plasma Sputter-Deposition Systems.- Influence of Sputter Gas Pressure and Substrate Bias on Intrinsic Stress and Crystallinity of Coatings Produced by Magnetron Sputtering.- Sputter Deposition of Multicomponent Targets: What Parts of the Process Affect the Elemental Composition of the Film.- A Proposition of a Novel Reactive Sputter-Deposition System for Synthesizing Multi-Component Materials.- The Influence of Precursors on the Preparation of Thin Pyrite Films by Metal Organic Chemical Vapor Deposition.- Modelling of the Intrinsic Stress in PVD-Coatings.- Physical Vapor Deposition of Multicomponent Oxide Thin Films: Techniques, Basic Deposition Processes and Film Processing-Microstructure-Property Relationships.- Pulsed Laser Deposited Metal-Oxide Based Superconductor, Semiconductor and Dielectric Heterostructures and Superlattices.- Synthesis of Optical Thin Films: Fundamentals and Applications.- Ion Beam-Based Characterization of Multicomponent Oxide Thin Films and Thin Film Layered Structures.- Electron Spectroscopic Analysis of Multicomponent Thin Films with Particular Emphasis on Oxides.- Transmission Electron Microscopy of Oxide Thin Films.- Laser Deposition of HTSC Films: Expansion of the Laser Plasma, Deposition of Particles, Formation of the Crystal Structure and Superconducting Properties of Films.- YBACUO Films by Pulsed Laser Deposition and Sputtering.- Transverse Electrooptic Properties of Magnetron Sputtered PLZT Thin Films.- Lead Zirconate Titanate Ferroelectric Thin Films by Laser Ablation Deposition.- Photo Voltaic Properties of Reactive Thermal Evaporated Indium Oxide (IO)/ Silicon Junctions.- In Situ Compositional Analysis of Multielement Thin Films.- Si-Ge Strained Layer Heterostructures: Device Possibilities and Process Limitations.- Growth, Properties and Applications of Epitaxial Selicides.- Deposition Fundamentals and Properties of Metallic and Diffusion Barrier Films.- Epitaxial CoSi2 Formation on (001) Si using Sequentially Deposited Ti-Co Bilayers.- Stress in Si1-xGex Films Prepared by Ion Beam Sputtering.- Band Engineering of High Bandgap Semiconductors by Superlattices.- Characterization of Tungsten Films and Hard Tungsten-Carbon Coatings Prepared by DC Magnetron Sputtering Process.- Pulsed Excimer Laser Induced Reactions at the Tungsten-Silicon Interface.- Rapid Pulsed CO2 - Laser Annealing of Silicon-Nitride / Silicon Interface States.- Interface Properties of Anodic Sulfide and Sulfide-Oxide Films on n-InSb.- Spin Glass Like Behavior in Cr-Cu Multilayers.- High Temperature Superconducting Thin Film-Based Devices.- Ferroelectric Thin Films and Device Applications.- Phase Locking in Series-Connected Nb-Al-Nb Planar Josephson Weak Links.