Vacuum is important in science and industry. The study of interaction of charged particles, neutrons and radiation with each other and solid surfaces requires a vacuum environment for reliable investigations. This book explains the basics of vacuum science and technology and is written for students, scientists, technicians and engineers.
Inhaltsverzeichnis
Preface and Acknowledgements
Introduction
1. Kinetic Theory of Gases
2. Flow of Gas and Conductance
3. Surface Phenomena
4. Interaction of Neutrals, Charged Particles and Radiation with Gases in Vacuum
5. Measurement of Pressure
6. Vacuum Pumps
7. System Design
8. Vacuum Measurement Methods
9. Vacuum Materials, Hardware, Fabrication Techniques, Cleaning Processes and Surface Treatment
10. Leak Detection
11. Extreme High Vacuum
12. Applications