Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.
Inhaltsverzeichnis
Fabrication technologies for ultra-thin chips. - Post-processing techniques and issues. - Properties of ultra-thin chips; Applications.