It is a well-known fact that microelectronics is one of the most influential technologies of the twentieth century. The boom of microelectromechanical systems (MEMS), in recent years, would not have been possible without the maturity of microelectronics technology. MEMS are small, integrated devices, which combine electronics, electrical as well as mechanical elements on a single chip. MEMS promises to revolutionize most micro products by combing microfabrication with a micromachining process. An unparalleled level of superiority, sophistication, functionality, reliability, and availability can be achieved on a small silicon chip at a relatively low cost. MEMS at the nano-scale is divided into nanoelectromechanical systems (NEMS) and nanotechnology.
