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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Inhaltsverzeichnis
Electron Optics of a Scanning Electron Microscope. - Electron Scattering and Diffusion. - Emission of Backscattered and Secondary Electrons. - Electron Detectors and Spectrometers. - Image Contrast and Signal Processing. - Electron-Beam-Induced Current and Cathodoluminescence. - Special Techniques in SEM. - Crystal Structure Analysis by Diffraction. - Elemental Analysis and Imaging with X-Rays.
Produktdetails
Erscheinungsdatum
17. September 1998
Sprache
englisch
Auflage
Second Edition 1998
Seitenanzahl
544
Reihe
Springer Series in Optical Sciences
Autor/Autorin
Ludwig Reimer
Herausgegeben von
P.W. Hawkes
Weitere Beteiligte
P.W. Hawkes
Verlag/Hersteller
Produktart
gebunden
Abbildungen
XIV, 529 p.
Gewicht
975 g
Größe (L/B/H)
241/160/35 mm
ISBN
9783540639763
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Pressestimmen
" . . . this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM. "
T Mulvey, Measurement Science and Technology. 11, No12, December 2000
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