Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

"... offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella." -Suman Chakraborty, IIT Kharagpur, India "Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books." -Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland ."... [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor... easy to read, and I found some concepts explained in ways I hadn't heard before... Very ambitious, very informative, very good for teaching!" -Jorg P. Kutter, Technical University of Denmark