This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.
Inhaltsverzeichnis
Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS. - Nanofriction by Reciprocating Sliding. - The structure and tribological behaviors of nanostructure thin films. - Detection of lateral forces and formation of atomic chains. - Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects. - Microfabricated sleds for friction studies. - Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications. - A Novel Method of Lubrication of Micro-Electro-Mechanical Systems. - Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS. - Lubrication of High Sliding MEMS. - Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant. - Probing the complexities of Friction in submicron contacts between two pristine surfaces. - Atomistic Simulation of Polymer Nanotribology. - Simulation of frictional behavior of polymer-on-polymer sliding. - Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications.
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